For Graduate School Candidates

MEMS is a new field of multiple disciplines such as electronics, machines, chemistry, material, fluid mechanics, optics and so on. The fusion of different disiplines is the source for creative ideas.

You need to know how to make MEMS as well as what kind of application systems are most required in the real world.

Over twenty years, the research in my laboratory focuses on the design, fabrication and application of micro/nano mechanisms and actuators that range from 10 nanometers to 100 micrometers in size.

Fabrication technology, called micromachining, is based on semiconductor processes.

The final goal is to build a smart micro system through the integration of moving mechanisms, sensors and electronics in a chip-size system.

Applications include optics, bio technology, nano technology, and information technology.

The MEMS technology enables us to make smart micro systems that have sensing, data processing, communication and actuation capability; thus it will provide us indispensable equipments for better quality of life in the future society.

Also you can meet excellent researchers and students from all over the world in my laboratory.

Let us enjoy encounters you have never thought about.

Research Themes

Smart microsystems and novel micro actuators

(1) Smart microsystems such as a 2-dimentional conveyance device composed of arrayed actuators, sensors and control circuits.

(2) Novel micro actuators such as a 12-bit MEMDAC (micro electromechanical digital to analogue converter). This device converts 12-bit electrical parallel input to mechanical displacement denoted by the 12-bit code. The minimum theoretical resolution is less than 1 nanometers.


MEMS Digital-to-Analogue converter (4-bit verson)

Nano scientific research using MEMS devices

Nano scientific research using MEMS devices includes the tensile testing of nano contacts in transmission electron microscope for in situ atomic level observation of deformation, and MEMS tweezers for capturing and characterizing DNA and other linear molecules electromechanically.

A pair of probes with 10-50 nm tip radius were micromachined with integrated microactuators. They were brought into contact to form a nano-contact.

The contact was pulled away mechanically. This procedure was performed in a ultra-high-vacuum TEM that visualized dynamic structural change during the tensile testing of the nano-contact.

Silicon contacts exhibited larger plastic deformation than gold contacts.

The similar twin-probe device was applied to obtain nano tweezers that handle DNA molecules.

Micromachined fluidic channels for isolation of DNA with sharp electrodes were fabricated and operated successfully. They isolated and captured a DNA molecule for further observation.


DNA bundle captured at the tip of nano tweezers

MEMS for bio technologies

MEMS for bio technologies includes micromachined fL-chambers and heaters to allow singlemolecular level characterization of bio molecules, integration of bio molecular motors in MEMS for direct sorting and transportation of specific sample molecules, and integration of living organisms, i.e. vorticella, to drive MEMS.

For bio assay of enzymes, microchips with fL-chambers and micro heaters were fabricated in which the enzymatic product was evaluated in a single molecular level. Rotational bio molecular motors, F1-ATPase, are immobilized on a chip equipped with a micro heater.

The rotational speed increased at elevated temperatures.

By encapsulating a single molecule in a extremely small chamber, its chemical activity, i.e. consumption and synthesis of ATP molecules, was associated with its mechanical rotation in a single molecular level.

It is also possible to utilize various functions of bio molecules by integrating them in MEMS.

A conveyance device driven by bio motor molecules (microtubules and kinesin) is reconstructed in MEMS fluidic devices.

Linear bio molecular motors, microtubules and kinesin, were integrated.

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Last-modified: 2017-02-17 (金) 15:14:31 (429d)