Research

Biotechnology †

• Nano transport system by biomolecular Motors
• Silicon Nanotweezers for biophysical experimentation on molecules
• Microsystems for the labeling of cells

Nanotechnology †

• MEMS-in-TEM
• Micro Field emitter
• Micro lateral tunneling unit.
• AFM cantilever array for parallel lithograpy.

Optical Microsystems (MOEMS) †

• 2 dimentional optical scanner for automobile applications

Micro-actuators †

• MEMS actuator array for Micro smart systems
• Inertia Drive actuator

Photograph of
Silicon Nanotweezers
fabricated with
Silicon-On-Insulator (SOI)
technology.

C. Yamahata et al.

Single DNA molecule
trapped between
aluminium "floating" electrodes
by means of ac dielectrophoresis.

M. Kumemura et al.