Biotechnology †
Nanotechnology †
- MEMS-in-TEM
- Micro Field emitter
- Micro lateral tunneling unit.
- AFM cantilever array for parallel lithograpy.
Optical Microsystems (MOEMS) †
- 2 dimentional optical scanner for automobile applications
Micro-actuators †
- MEMS actuator array for Micro smart systems
- Inertia Drive actuator
Photograph of
Silicon Nanotweezers
fabricated with
Silicon-On-Insulator (SOI)
technology.
C. Yamahata et al.
Single DNA molecule
trapped between
aluminium "floating" electrodes
by means of ac dielectrophoresis.
M. Kumemura et al.