1. Hideo Muro. Takahiko Oki. Akira Asaoka. Tarik Bourouina. Gilbert Ryene. Alexis Debray. Eric Lebrasseur. Hiroyuki Fujita,"A Method to Measure Beam Deflections in Different Resonance Modes Piezoresistively and its Incorporation into 2D Optical Microscanners",電気学会論文誌E(センサ・マイクロマシン準部門誌) ,Vol.127. No.1. 2007,pp.31-36
  2. Murat Gel. Tadashi Ishida. Tetsuo Akasaka. Akinori Umeno. Koji Araki. Kaz Hirakawa. and Hiroyuki Fujita,"Mechanically Controlled Quantum Contact With On-Chip MEMS Actuator",Journal of Microelectromechanical Systems,Vol.16. No.1. February 2007,pp.1-6
  3. Kazuhiro Takahashi. Ho Nam Kwon. Makoto Mita. Kunihiko Saruta. Jong-Hyun Lee. Hiroyuki Fujita. Hiroshi Toshiyoshi,"A Silicon Micromachined f-θ(thetha) Microlens Scanner Array by Double-Deck Device Design Technique",IEEE Journal of Selected Topics in Quantum Electronics,Vol.13. No.2. March/April 2007,pp.277-282
  4. 泰井祐輔. 角嶋邦之. 横川隆司. 小野志亜之. 高橋琢二. 諫本圭史. 鄭昌鎬. 藤田博之. 年吉洋,"フッ酸. オゾン. HMDSを用いたMEMSデバイスの全気相処理によるスティクション力低減",電気学会論文誌Eセンサ・マイクロマシン準部門誌,Vol.127. No.4. 2007,pp.221-227
  5. Edin Sarajlic. Dominique Collard. Hiroshi Toshiyoshi. Hiroyuki Fujita,"Design and Modeling of Compliant Micromechanism for Mechanical Digital-to-Analog Conversion of Displacement",IEEJ Transactions on Electrical and Electronic Engineering,Vol.20. No.3. 2007,pp.357-364
  6. Naoyuki Nozawa. Kuniyuki Kakushima. Gen Hashiguchi. Hiroyuki Fujita,"In situ Visualization of Degradation of Silicon Field Emitter Tips",IEEJ Transactions on Electrical and Electronic Engineering,Vol.20. No.3. 2007,pp.284-288
  7. Michael Zickar. Makoto Mita. Manabu Ataka. Hiroyuki Fujita,"Low Cross Talk Design and Simple Fabrication Process of Electrostatic Vertical Comb-drive Actuators for Positioning Application",IEEJ Transactions on Electrical and Electronic Engineering,Vol.20. No.3. 2007,pp.289-294
  8. Dominique Collard. Christophe Yamahata. Bernard Legrand. Tetsuya Takekawa. Momoko Kumemura. Naoyoshi Sakaki. Gen Hashiguchi. Hiroyuki Fujita,"Towards Mechanical Characterization of Biomolecules by MNEMS Tools",IEEJ Transactions on Electrical and Electronic Engineering,Vol.20. No.3,pp.262-271 E. Sarajlic. C. Yamahata. H. Fujita,"Towards wet anisotropic silicon etching of perfect pyramidal pits",Microelectronic Engineering,Vol.84. Issue 5-8,pp.1419-1422
  9. K. Yamashita. W. Sun. B. Charlot. K. Kakushima. H. Fujita. and H. Toshiyoshi,"Vacuum. temperature. and time dependencies of field-emission current for RF-MEMS applications",Microelectronic Engineering,Vol.84. Issue 5-8,pp.1345-1353
  10. A Debray. K Ueda. M Shibata. H Fujita,"Fabrication of suspended metallic structures: application to a one-shot micro-valve",IEICE Electronics Express,Vol. 4 (2007) . No. 14,pp.455-460
  11. A Debray. M Shibata and H Fujita,"A low melting point alloy as a functional material for a one-shot micro-valve",J. Micromech. Microeng.,Vol.17. No.8 ,pp.1442-1450
  12. M. Kumemura. D. Collard. C. Yamahata. N. Sakaki. G. Hashiguchi. and H. Fujita,"Single DNA Molecule isolation and trapping in a microfluidic device",ChemPhysChem?,Vol.8. No.12,pp.1875-1880
  13. M.Kumemura. D.Collard. C.Yamahata. N.Sakaki. G.Hashiguchi. H.Fujita,"Cover picture: Single DNA Molecule isolation and trapping in a microfluidic device",ChemPhysChem?,Vol.8,p.1733
  14. Hiroyuki Fujita,"MEMS for Heterogeneous Integration of Devices and Functionality",Journal of Semiconductor Technology and Science. Special issue on Nano/Micro System Technologies,Vol.7. No.3,pp.133-139
  15. 藤田博之. 年吉洋,"大面積MEMS技術と整合する黒板型ディスプレイの制作と評価",日本画像学会誌,第46巻. 第5号,pp.51-56
  16. F. Rose. H. Fujita and H. Kawakatsu,"Real-time observation of FIB-created dots and ripples on GaAs?" Nanotechnology,Vol.19,pp.035301-035307


  1. R. Yokokawa. Y. Yumi. S. Takeuchi. T. Kon. and H. Fujita,"Unidirectional transport of a bead on a single microtubule immobilized in a submicrometre channel", Nanotechnology,vol. 17. 2006,pp. 289-294
  2. Hideyuki Arata. Peter Löw. Koji Ishizuka. Christian Bergaud. Beomjoon Kim. Hiroyuki Noji. Hiroyuki Fujita,"Temperature Distribution Measurement on Microfabricated Thermodevice for Single Biomolecular Observation Using Fluorescent dye",Sensors and Actuators B,Vol.117,pp.339-345 藤田博之,"MEMSとトライボロジー",月刊トライボロジー,No.222,pp.16-19
  3. Benjamin Caillard. Yoshio Mita. Yamato Fukuta. Tadashi Shibata. and Hiroyuki Fujita,"A Highly Simple Failure Detection Method for Electrostatic Microactuators: Application to Automatic Testing and Accelerated Lifetime Estimation",IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING,Vol.19. No.1. February 2006,pp.35-42
  4. Shoogo Ueno. Joji Ando. Hiroyuki Fujita. Tadashi Sugawara. Yasuhiko Jinbo. Keiji Itaka. Kazunori Kataoka. and Takashi Ushida,"The State of the Art of Nanobioscience in Japan",IEEE Transaction on Nanobioscience,Vol.5. No.1. March 2006,pp.54-65
  5. K.Yamashita. W.Sun. K. Kakushima. H.Fujita. and H.Toshiyoshi,"RF microelectromechanical system device with a lateral field-emission detector",J. Vac. Sci. Technol. B,Vol. 24. No. 2,pp. 927-931
  6. R. Shigematsu. A. Higo. H. Toshiyoshi and H. Fujita,"An Electrostatically Latched and Magnetically Erased MEMS re-Writable Btimap Image Display",IEICE Electronics Express,Vol. 3 (2006). No. 5,pp.87-91
  7. Kenjiro Ayano. Katuyori Suzuki. Gen Hashiguchi. Hiroyuki Fujita,"Electromechanical Analysis of a Micromachined Comb-Drive Actuator by Admittance Measurement",電気学会論文誌E. センサ・マイクロマシン準部門誌,Vol.126. No.7,pp.281-285
  8. Alexis Debray. Yves-Andre Chapuis. Masaaki Shibata and Hiroyuki Fujita,"Fluidic self-alignment applied to a micro-fluidic system",IEICE Electron. Express,Vol. 3. No. 11,pp.227-232
  9. Ryuji Yokokawa. Tomohiko Saika. Testuya Nakayama. Hiroyuki Fujita and Satoshi Konishi,"On-chip syringe pumps for picoliter-scale liquid manipulation",Lab Chip. 2006,Vol.6,pp.1062 - 1066
  10. 飯塚哲彦. 坂井直道. 藤田博之,"高温超電導体への部分的着磁ガイドを用いた磁気浮上搬送の基礎研究",電気学会論文誌. センサ・マイクロマシン準部門誌,Vol.126. No.6,pp.248-254
  11. 薗部忠. 広井典良. 竹中充. 中野義昭. 藤田博之,"高密度光IC用ファイバアレイOPLEAF",電気学会論文誌E. センサ・マイクロマシン準部門誌,Vol.126. No.6,pp.255-260
  12. F. Rose. P. Martin. H Fujita. and H Kawakatsu,"Adsorption and combing of DNA on HOPG surfaces of bulk crystals and nanosheets: application to the bridging of DNA between HOPG/Si heterostructures",Nanotechnology,Vol.17. No.13 (2006),pp.3325-3332
  13. Yamato Fukuta. Yves-Andre Chapuis. Yoshio Mita. and Hiroyuki Fujita,"Design. Fabrication. and Control of MEMS-Based Actuator Arrays for Air-Flow Distributed Micromanipulation",IEEE Journal of Microelectromechanical Systems,Vol.15. No.4,pp212-226
  14. A. Debray. T. Nakakubo. A.Yokoi. S. Mogi. K. Ueda. M. Shibata. S. Takeuchi and H. Fujita,"A micro-machined safety valve for power applications with improved sealing",Journal of Micromechanics and Microengineering,16,pp.S240-S247
  15. Y. Yoshida. R. Yokokawa. H. Suzuki. K. Atsuta. H. Fujita. and S. Takeuchi,"Biomolecular linear motors confined to move upon micro-patterns on glass",Journal of Micromechanics and Microengineering,Vol. 16,pp.1550-1554
  16. F.Rose. M. Hattori. D. Kobayashi. H. Toshiyoshi. H. Fujita and H. Kawakatsu,"Application of capillary forces and stiction for lateral displacement. alignment. suspension and locking of self-assembled microcantilevers",Journal of Micromechanics and Microengineering,Vol16. No10 (2006),pp.2077-2085
  17. Nicolas Tiercelin. Philippe Coquet. Ronan Sauleau. Vincent Senez and Hiroyuki Fujita,"Polydimethylsiloxane membranes for millimeter-wave planar ultra flexible antennas",Journal of Micromechanics and Microengineering,Vol.16,pp.2389-2395
  18. 石田忠. 角嶋邦之. 藤田博之,"MEMS方向探針による金ナノコンタクト接近-衝突-引張-破断実験のHRTEM観察と電流測定",電気学会論文誌E. センサ・マイクロマシン準部門誌,Vol.126. No.9,pp.504-509
  19. F.Rose. A.Debray. P.Martin. H.Fujita. and H.Kawakatsu,"Suspended HOPG nanosheets for HOPG nanoresonators engineering and new carbon nanostructures synthesis",Nanotechnology,Vol. 17. No. 20 (2006),pp.5192-5200
  20. Hiroyuki Fujita,"Evolution from MEMS-based Linear Drives to Bio-based Drives",電気学会論文誌D(産業応用部門誌),平成18年10月号. IEEJ Trans. IA. Vol.126. No.10,pp.1314-1318


  1. Y. Rondelez, G. Tresset, K. V. Tabata, H. Arata, H. Fujita, S. Takeuchi, H. Noji, ”Microfabricated arrays of femtoliter chambers allow single molecule enzymology”, /Nature biotechnology,/ 2005 Mar;23(3):361-5.
  2. Hideyuki Arata, Hiroyuki Noji, Hiroyuki Fujita, “Enzymatic Activity Measurement at High Temperature by Pulse Heating of Micro Reactor with On-Chip Micro Heater”, /IEEJ Trans. SM,/ vol. 125, No. 5, 2005, pp. 234-238. (in Japanese)
  3. Hideyuki F. Arata, Yannick Rondelez, Hiroyuki Noji, Hiroyuki Fujita, ” Temperature Alternation by an On-Chip Microheater To Reveal Enzymatic Activity of β-Galactosidase at High Temperatures”,* */Analytical Chemistry, /Vol. 77, No. 15, August 1, 2005, pp. 4810-4814.


  1. R. Yokokawa, S. Takeuchi, T. Kon, M. Nishiura, K. Sutoh, H. Fujita, "Unidirectional transport of kinesin-coated beads on microtubules oriented in a microfluidic device," Nano Letters.(in press; Web Release Date: 22-Oct-2004)
  2. Ryuji Yokokawa, Shoji Takeuchi, Hiroyuki Fujita, "Ultra-smooth glass channels for bioassay with motor proteins," Analyst, vol. 129, pp. 850-854, 2004.
  3. Ryuji YOKOKAWA, Shoji TAKEUCHI, M. Nishiura, R. Ohkura, T. Kon, K. Sutoh, H. Fujita, "Hybrid Nano Transfer System by Biomolecular Linear Motors," Journal of Microelectromechanical Systems, vol. 13, no. 4, pp. 612-619, 2004.
  4. 新田英之, 竹内昌治, 野地博行, 藤田博之, "顕微鏡観察下における局所的温度制御のためのマイクロデバイス," 電気学会誌、vol. 124-E, no. 8, pp. 284-288, 2004. (in Japanese)
  5. Makoto Mita, Hiroshi Toshiyoshi, Manabu Ataka, and Hiroyuki Fujita, "Generation of Random Numbers by Micromechanism," IEEJ Trans. SM, vol. 124, No. 9, 2004, pp. 316-320
  6. Keiji Isamoto, Atsushi Morosawa, Masataka Tei, Hiroyuki Fujita and Hiroshi Toshiyoshi, "A 5-volt operated MEMS variable optical attenuator by SOI bulk micromachining," IEEE J. Selected Topics in Quantum Elec (JSTQE), vol. 10, No. 3, May-June 2004, pp. 570-578.
  7. Keiji Isamoto, Atsushi Morosawa, Masataka Tei, Hiroyuki Fujita and Hiroshi Toshiyoshi, "MEMS Variable Optical Attenuator using Asymmetricaly Driven Paralle Plate Tilt Mirror," IEEJ Trans. SM, vol. 124, No. 6, 2004, pp. 213-218
  8. Tomonori Yoshino, Hiroshi Toshiyoshi, Makoto Mita, Dai Kobayashi, and Hiroyuki Fujita, "An Electrostatic Microactuator for Positioning a Hard-Disk Drive Magnetic Head," IEEJ Trans. SM, Vol. 124, No. 1, 2004, pp. 21-27
  9. Hideyuki Arata, Shoji Takeuchi, Hiroyuki Noji, Hiroyuki Fujita, “Micro Device for Local Temperature Control under Microscope”, /IEEJ Trans. SM,/ vol. 124, No. 8, 2004, pp. 284-288 (in Japanese)


  1. Matthieu Denoual, Laurent Griscom, Hiroshi Toshiyoshi and Hiroyuki Fujita, "Accurate Double-Height Micromolding Method for Three-Dimensional Polydimethylsiloxane Structures ", Jpn. J. Appl. Phys. Vol. 42 (2003) pp.4598-4601.
  2. Kunihiko Saruta, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Fabrication of Micro Lens Optical Scanner on SOI Wafer," IEEJ Trans. SM, Vol. 123, No. 7 (2003), pp. 231-236.
  3. Yamato Fukuta, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Vapor Hydrofluoric Acid Sacrificial Release Technique for Micro Electro Mechanical Systems Using Labware," Jpn. J. Appl. Phys. Vol. 42, Part 1, No. 6A (2003), pp. 3690 - 3694.


  1. H. Kawakatsu, S. Kawai, D. Saya, M. Nagashio, D. Kobayashi, H. Toshiyoshi, and H. Fujita, "Towards atomic force microscopy up to 100 MHz," Review of Scientific Instruments, Vol. 73, No. 6 (2002), pp. 2317-2320.
  2. Hideki Kawakatsu, Daisuke Saya, Atsushi Kato, Kimitake Fukushima, Hiroshi Toshiyoshi, and Hiroyuki Fujita, "Millions of cantilevers for atomic force microscopy," Review of Scientific Instruments, Vol. 73, No. 3 (2002), pp. 1188-1192.
  3. D. Saya, K. Fukushima, H. Toshiyoshi, G. Hashiguchi, H. Fujita, H. Kawakatsu, "Fabrication of single-crystal Si cantilever array," Sensors and Actuators A: Physical, vol. 95, Issue 2-3, 2002, pp. 281-287.
  4. H. Toshiyoshi, M. Mita, and H. Fujita, "A MEMS Piggyback Actautor for Hard-Disk Drives," IEEE J. Microelectromech. Syst., vol. 11, No. 6, Dec. 2002, pp. 648-654.


  1. Daisuke Saya, Kimitake Fukushima, Hiroshi Toshiyoshi, Gen Hashiguchi, Hiroyuki Fujita, Hideki Kawakatsu, "Fabrication of Nanometric Oscillators," Seisan-Kenkyu, vol. 53, No. 2 (2001.2), pp. 135-138.
  2. Kimitake Fukushima, Daisuke Saya, Hiroshi Toshiyoshi, Hiroyuki Fujita, Hideki Kawaktsu, "Characterization of Silicon Nanocantilevers," Seisan-Kenkyu, vol. 53, No. 2 (2001.2), pp. 139-142.
  3. Kouichi Yamashita, Hiroyuki Fujita, Hiroshi Toshiyoshi, "Fabrication and Characterization of Acoustic Frequency Analysis Sensors made of SOI Wafers," Seisan-Kenkyu, vol. 53, No. 2 (2001.2), pp. 143-146. (in Japanese)


  1. Hiroyuki Fujita and Hiroshi Toshiyoshi, "Micromechanical Optical Devices," Oyo Buturi (Transaction of Japan Society of Applied Physics), vol. 69, No. 11, 2000, pp. 1274-1284 (in Japanese, invited).
  2. Hiroyuki Fujita and Hiroshi Toshiyoshi, "Optical MEMS," IEICE Trans. Electron., vol. E83-C, No. 9, September 2000, p. 1427 - 1434.
  3. Makoto Mita, Yoshio Mita, Hiroshi Toshiyoshi, Hiroyuki Fujita, "Multiple-height Microstructures Fabricated by ICP-RIE and Embedded Masking Layers," Trans. Institute of Electrical Engineers of Japan,vol. 120-E, No.11, November. 2000, p.493.
  4. Daisuke Saya, Kimitake Fukushima, Hiroshi Toshiyoshi, Hiroyuki Fujita, Gen Hashiguchi, Hideki Kawakatsu, "Fabrication of Silicon-Based Filiform-Necked Nanometric Oscillators," Jpn. J. Appl. Phys. Vol. 39, Part 1. No. 6B (June 2000) pp.3793-3798.
  5. H. Kawakatsu, H. Toshiyoshi, D. Saya, K. Fukushima, H. Fujita, "Strength measurement and calculations on silicon-based nanometric oscillators for scanning force microcopy operating in the gigahertz range," Applied Surface Science, vol.157, (no.4), (NC-AFM'99. Second International Workshop on Noncontact Atomic Force Microscopy, Pontresina, Switzerland, 1-4 Sept. 1999.) Elsevier, April 2000. p.320-5. 13 references.
  6. Hiroshi Toshiyoshi, Dai Kobayashi, Makoto Mita, Gen Hashiguchi, Hiroyuki Fujita, Junji Endo, Yasuo Wada, "Microelectromechanical Digital-to-Analog Converter of Displacement for Step Motion Actuators," IEEE/ASME J. Microelectromech. Sys. vol. 9, June 2000, p.218-225.
  7. H. Kawakatsu, H. Toshiyoshi, D. Saya, K. Fukushima, H. Fujita, "Fabrication of a silicon based nanometric oscillator with a tip form mass for scanning force microcopy operating in the GHz range," J. Vac. Sci. & Tech. B18, No,.2 (2000) p.607-11.


  1. H. Kawakatsu, H. Toshiyoshi, D. Saya, H. Fujita "Fabrication Technique of Nanometri Mechanical Oscillator," Seisan-Kenkyu vol. 51 (no. 8), Aug. 1999, p. 663. (Institute of Industrial Science, University of Tokyo, Tokyo, Japan)
  2. H. Toshiyoshi, D. Kobayashi, M. Mita, G. Hashiguchi, H. Fujita, J. Endo, Y. Wada, "Step Motion Actuators by Silicon Micromachining," Seisan-Kenkyu vol. 51 (no. 8), Aug. 1999, p. 647. (Institute of Industrial Science, University of Tokyo, Tokyo, Japan) (in Japanese)
  3. Jean Podlecki,k Masao Nshioka, Hiroshi Toshiyoshi, Yasuhiko Arakawa, Hiroyuki Fujita, "Tunable Vertical Cavity laser and Photodetector for Free Space Interconnection," Seisan-Kenkyu vol. 51 (no. 8), Aug, 1999, p. 626 (Institute of Industrial Science, University of Tokyo, Tokyo, Japan)
  4. Hiroshi Toshiyoshi, Dai Kobayashi, Makoto Mita, Gen Hashiguchi, Hiroyuki Fujita, Junji Endo, Yasuo Wada, "A Digital-to-Analog Conveter of Displacement by Integrated Micromechanism," Jpn. J. Appl. Phys. Vol.38(1999) Part 1, No. 6B, 30 June 1999, p. 3962.
  5. Kyoseok Chun, Gen Hashiguchi, Hiroshi Toshiyoshi and Hiroyuki Fujita, "Fabrication of Array of Hollow Microcapillaries Used for Injection of Genetic Materials into Animal/Plant Cells ," Jpn. J. Appl. Phys. Vol.38 (1999) pp.L279-L281 , Part 2, No. 3A, 1 March 1999.
  6. Hideki Kawakatsu, Hiroshi Toshiyoshi, Daisuke Saya, Hiroyuki Fujita, "A Silicon Based Nanometric Oscillator for Scanning Force Microscopy Operation in the 100 MHz Range," Japanese Journal of Appl. Phys. vol. 38, Part 1, No. 6B, June 1999, pp. 3962-3965.
  7. Hiroshi Toshiyoshi, Masahide Goto, Makoto Mita, Hiroyuki Fujita, Dai Kobayashi, Gen Hashiguchi, Junji Endo, Yasuo Wada, "Fabrication of Micromechanical Tunneling Probes and Actuators on a Silicon Chip," Japanese J. Appl. Phys. vol. 38, Part 1, No. 12B (Special Issue on Microprocesses & Nanotechnology), Dec. 1999, pp. 7185-7189.
  8. Makoto Mita, Yoshio Mita, Hiroshi Toshiyoshi, Hiroyuki Fujita, "Delay-Msking Process for Silicon Three-Dimensional Bulk Structures," Trans. IEE Japan, 199-E(5), pp.310-311, 1999 (in Japanese)
  9. Muneo Harada, Naoki Ikeuchi, Shoichi Fukui, Hiroshi Toshiyoshi, Hiroyuki Fujita, Shigeru Ando, "Micro Mechanical Acoustic Sensor toward Artificial Basilar Membrane Modeling," Trans. IEE Japan, vol.119-E, No.3 (1999) pp.125-130.
  10. Hiroshi Toshiyoshi, Daisuke Miyauchi, Hiroyuki Fujita, "Electromagnetic Torsion Mirrors for Self-Aligned Fiber Optic Cross-connectors by Silicon Micromachining," IEEE Journal of Selected Topics in Quantum Electronics (JSTQE), special issue on Micro-Opto-Electro Mechanical Systems (MOEMS), vol.5, No.1 (1999), pp.10-17. [PDF 636 kB]
  11. Eric Bonnotte, Christophe Gorecki, Hiroshi Toshiyoshi, Hideki Kawakatsu, Hiroyuki Fujita, K.Worhoff, Ken-ya Hashimoto, "Guided-Wave Acoustooptic Interaction with Phase Modulation in a ZnO Thin-Film Transducer onan Si-Based Integrated Mach-Zehnder Interferometer," JEEE/OSA Journal of Lightwave Technology (JLT), vol. 17, No. 1 (1999), pp. 35-42.
  12. Hiroshi Toshiyoshi, Masakazu Kobayashi, Daisuke Miyauchi, Hiroyuki Fujita, "Design and Analysis of Micromechanical Tunable Interferometers for WDM Free-Space Optical Interconnection," JEEE/OSA Journal of Lightwave Technology (JLT), vol. 17, No. 1 (1999), pp. 19-25.
  13. Daisuke Miyauchi, Hiroshi Toshiyoshi, Hiroyuki Fujita, "Self-Alignment Fabrication Technique Surface-Micromachined Optical Switches to Bulk-Micromachined V-Grooves," Trans. IEE Japan, vol. 119-E, No. 2 (1999) pp.108-112.

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